MICORMACHINED MULTILAYER SU8 DOUBLE-SIDED PIN-FLANGE ADAPTER FOR 220-325 GHZ

Paper i proceeding, 2014

We present the first double-sided pin-flange adapter for 220 􀀀 325 GHz solely made out of gold covered multilayered SU8. The process is based on exposing layers with different patterns realizing openings through both layers and pin structures in only one of the layers. Each process gives two layers which are then bonded back to back resulting in a four layer device. SU8 has the benefit of being cheap and robust compared to Si and is useful for applications where the device will be handled by hand and could be exposed to uneven forces. The multilayer SU8 double-sided pin-flange adapter was successfully fabricated. Measurements and evaluations will be presented at the conference.