MICORMACHINED MULTILAYER SU8 DOUBLE-SIDED PIN-FLANGE ADAPTER FOR 220-325 GHZ
Paper in proceeding, 2014
We present the first double-sided
pin-flange adapter for 220 325 GHz solely made
out of gold covered multilayered SU8. The process
is based on exposing layers with different patterns
realizing openings through both layers and pin
structures in only one of the layers. Each process
gives two layers which are then bonded back to
back resulting in a four layer device. SU8 has the
benefit of being cheap and robust compared to Si
and is useful for applications where the device will
be handled by hand and could be exposed to uneven
forces. The multilayer SU8 double-sided pin-flange
adapter was successfully fabricated. Measurements
and evaluations will be presented at the conference.
Author
Sofia Rahiminejad
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Elena Pucci
Chalmers, Signals and Systems, Kommunikationssystem, informationsteori och antenner
Sjoerd Haasl
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
25th Micromechanics and Microsystems Europe Workshop, MME 2014, Istanbul, Turkey, August 31 - September 3, 2014
Areas of Advance
Production
Materials Science
Subject Categories (SSIF 2011)
Nano Technology