Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL
Paper i proceeding, 2010
We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.
Författare
Hooman A. Davani
Technische Universitat Darmstadt
Christian Grasse
Walter Schottky Institute
Benjamin Kögel
Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik
Petter Westbergh
Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik
Christian Gierl
Technische Universitat Darmstadt
Karolina Zogal
Technische Universitat Darmstadt
Sandro Jatta
Technische Universitat Darmstadt
Gerhard Böhm
Walter Schottky Institute
Tobias Gründl
Walter Schottky Institute
Peter Meissner
Technische Universitat Darmstadt
Anders Larsson
Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik
M. C. Amann
Walter Schottky Institute
Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International
0899-9406 (ISSN)
9-10978-1-4244-5683-3 (ISBN)
Ämneskategorier (SSIF 2011)
Telekommunikation
DOI
10.1109/ISLC.2010.5642777
ISBN
978-1-4244-5683-3