Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL
Paper in proceeding, 2010
We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.
Author
Hooman A. Davani
Technische Universitat Darmstadt
Christian Grasse
Walter Schottky Institute
Benjamin Kögel
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Petter Westbergh
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Christian Gierl
Technische Universitat Darmstadt
Karolina Zogal
Technische Universitat Darmstadt
Sandro Jatta
Technische Universitat Darmstadt
Gerhard Böhm
Walter Schottky Institute
Tobias Gründl
Walter Schottky Institute
Peter Meissner
Technische Universitat Darmstadt
Anders Larsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
M. C. Amann
Walter Schottky Institute
Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International
0899-9406 (ISSN)
9-10978-1-4244-5683-3 (ISBN)
Subject Categories (SSIF 2011)
Telecommunications
DOI
10.1109/ISLC.2010.5642777
ISBN
978-1-4244-5683-3