Compatibility Assessment of CVD growth of Carbon nanofibers on bulkCMOS devices
Journal article, 2008
Author
Farzan Alavian Ghavanini
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Helen lepoche
Jonas Berg
Muhammad Amin
Mohammad Kabir
Per Lundgren
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Areas of Advance
Nanoscience and Nanotechnology
Production
Subject Categories (SSIF 2011)
Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory