Applications of aluminium nitride films deposited by reactive sputtering to silicon-on-insulator materials

Stefan Bengtsson; Mats Bergh; Manolis Choumas; Christian Olesen; Kjell Jeppson

Applications of aluminium nitride films deposited by reactive sputtering to silicon-on-insulator materials
Journal article, 1996

Author

Stefan Bengtsson

Other publications Research

Mats Bergh

Manolis Choumas

Department of Solid State Electronics

Christian Olesen

Kjell Jeppson

Department of Solid State Electronics

Other publications Research

Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers

Vol. 35 8 4175-4181

Subject Categories (SSIF 2011)

Other Electrical Engineering, Electronic Engineering, Information Engineering

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Created

10/7/2017

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