Hybrid-mounted micromachined aluminum hotwires for wall shear stress measurements
Artikel i vetenskaplig tidskrift, 2005
In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor. © 2005 IEEE.
Författare
Sjoerd Haasl
The Royal Institute of Technology (KTH)
Dirk Mucha
The Royal Institute of Technology (KTH)
Fraunhofer-Institut fur Produktionsanlagen und Konstruktionstechnik
Valery Chernoray
Chalmers, Tillämpad mekanik
Thorbjörn Ebefors
The Royal Institute of Technology (KTH)
Silex Microsystems
Peter Enoksson
Chalmers, Mikroteknologi och nanovetenskap (MC2), Fasta tillståndets elektronik
Lennart Löfdahl
Chalmers, Tillämpad mekanik
Göran Stemme
The Royal Institute of Technology (KTH)
Journal of Microelectromechanical Systems
1057-7157 (ISSN)
Vol. 14 2 254-260Ämneskategorier (SSIF 2011)
Reglerteknik
DOI
10.1109/JMEMS.2004.839029