Electrostatic feedback for MEMS sensor for in situ TEM instrumentation
Paper in proceeding, 2008
A capacitive force sensor for in situ TEM instrumentation is investigated. In order to prevent movement of the suspended plate in the capacitive sensor force feedback has been investigated, primarily using CV measurements. A manual feedback has successfully been implemented and an analytical model using a serial and a parallel capacitor is presented.
Electrostatic force modeling
Force feedback
Force sensor
Author
Alexandra Nafari
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Ning Chang
Johan Angenete
Krister Svensson
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Eurosensors 2008
Subject Categories (SSIF 2011)
Condensed Matter Physics