Mechanically Coupled Comb Drive MEMS Stages
Paper in proceeding, 2008
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle Is presented for fast and large stroke scanning applications. 9 μm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
electrostatic actuation
Mechanical coupling
MEMS stage
Author
Aslihan Arslan
Koc Universitesi
Caglar Ataman
Koc Universitesi
Sven Holmström
Koc Universitesi
Karin Hedsten
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
H. Rahmi Seren
Koc Universitesi
Hakan Urey
Koc Universitesi
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS; Freiburg; Germany; 11 August 2008 through 14 August 2008
140-141
978-142441918-0 (ISBN)
Subject Categories (SSIF 2011)
Telecommunications
DOI
10.1109/OMEMS.2008.4607868
ISBN
978-142441918-0