Formation of deep traps at the 4H-SiC/SiO2 interface when utilizing sodium enhanced oxidation
Paper in proceeding, 2007
Author
Fredrik Allerstam
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Gudjon Gudjonsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Einar Sveinbjörnsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Thomas Rödle
Hendrikus Jos
Materials Science Forum
0255-5476 (ISSN)
Vol. 556-557 517-520Subject Categories (SSIF 2011)
Condensed Matter Physics