Sodium Enhanced Oxidation of Si-face 4H-SiC: a Method to Remove Near Interface Traps
Paper in proceeding, 2007

Author

Einar Sveinbjörnsson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Other publications Research

Fredrik Allerstam

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Other publications Research

Halldor Olafsson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Other publications Research

Gudjon Gudjonsson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Dimitar Milkov Dochev

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Other publications Research

Thomas Rödle

Materials Science Forum

0255-5476 (ISSN)

Vol. 556-557 487-492

Subject Categories (SSIF 2011)

Condensed Matter Physics

More information

Created

10/6/2017

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