Cr evaporation of metallic interconnects: A novel method for quantification
Paper in proceeding, 2009
Author
Jan Froitzheim
Chalmers, Chemical and Biological Engineering, Environmental Inorganic Chemistry
E. G. Larsson
Chalmers University of Technology
Lars-Gunnar Johansson
Chalmers, Chemical and Biological Engineering, Environmental Inorganic Chemistry
Jan-Erik Svensson
Chalmers, Chemical and Biological Engineering, Environmental Inorganic Chemistry
ECS Transactions
1938-5862 (ISSN) 1938-6737 (eISSN)
Vol. 25 2 PART 2 1423-1428978-156677739-1 (ISBN)
Subject Categories (SSIF 2011)
Inorganic Chemistry
DOI
10.1149/1.3205674
ISBN
978-156677739-1