Rapid manufacturing of OSTE polymer RF-MEMS components
Paper in proceeding, 2017
This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor. © 2017 IEEE.
Author
Sofia Rahiminejad
Electronics Material and Systems
J. Hansson
Mercene Labs AB
The Royal Institute of Technology (KTH)
Elof Köhler
Electronics Material and Systems
W. van der Wijngaart
The Royal Institute of Technology (KTH)
T. Haraldsson
Mercene Labs AB
The Royal Institute of Technology (KTH)
Sjoerd Haasl
Electronics Material and Systems
Peter Enoksson
Electronics Material and Systems
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
10846999 (ISSN)
901-904 78635549781509050789 (ISBN)
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology
Transport
Production
Materials Science
Subject Categories (SSIF 2011)
Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory
DOI
10.1109/MEMSYS.2017.7863554
ISBN
9781509050789