Micromechanical shutter based mass spectrometers
Paper in proceeding, 2009
Author
M Wieser
Instiutet for rymdfysik
S Barabash
Instiutet for rymdfysik
Martin Emanuelsson
Instiutet for rymdfysik
Klas Brinkfelt
Chalmers, Microtechnology and Nanoscience (MC2)
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2)
AIP Conference Proceedings
0094-243X (ISSN) 1551-7616 (eISSN)
Vol. 1144 114-118978-073540681-0 (ISBN)
Subject Categories (SSIF 2011)
Astronomy, Astrophysics and Cosmology
Other Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory
DOI
10.1063/1.3169274
ISBN
978-073540681-0