GaAs High-Contrast Gratings with InGaP Sacrificial Layer for Multi-Wavelength VCSEL Arrays
Paper in proceeding, 2016
We report on highly reflective suspended GaAs high-contrast gratings (HCGs) using an InGaP sacrificial layer. A high reflectivity approaching 100% was observed both in direct reflectivity measurement and by low threshold currents in fabricated multi-wavelength HCG-VCSEL arrays.
InGaP
High-contrast grating (HCG)
sacrificial layer
vertical-cavity surface-emitting laser (VCSEL)
Author
Erik Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Johan Gustavsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
W. V. Sorin
Hewlett Packard Enterprise
Jörgen Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
David Fattal
LEIA Inc.
Åsa Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Anders Larsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Michael Tan
Chalmers University of Technology
Conference Digest - IEEE International Semiconductor Laser Conference
08999406 (ISSN)
Vol. TuD2 Article n0 7765746- 7765746978-4-8855-2306-9 (ISBN)
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology
Subject Categories (SSIF 2011)
Telecommunications
Physical Sciences
Nano Technology
Infrastructure
Nanofabrication Laboratory
ISBN
978-4-8855-2306-9