Micromachined gap waveguides for 100 GHz applications
Paper in proceeding, 2013

The present paper demonstrates groove gap waveguides at around 100 GHz, fabricated on Gold-plated micromachined silicon. Three different groove gap waveguides have been manufactured and measured: a resonator for determining Q-factor and thereby attenuation, a straight waveguide, and a waveguide with two 90 degree bends.

Waveguide

Bed of nails

Micromachining

Waveguides

Straight waveguides

Gap Waveguide

90-degree bend

Gap waveguides

High frequency HF

Micromachined silicon

Groove

High-frequency

Antennas

Micro-machined

Author

Sofia Rahiminejad

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Syed Hasan Raza Zaidi

Chalmers, Signals and Systems, Kommunikationssystem, informationsteori och antenner

Ashraf Uz Zaman

Chalmers, Signals and Systems, Kommunikationssystem, informationsteori och antenner

S. Haasl

The Royal Institute of Technology (KTH)

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Per-Simon Kildal

Chalmers, Signals and Systems, Kommunikationssystem, informationsteori och antenner

2013 7th European Conference on Antennas and Propagation, EuCAP 2013

1935-1938
9788890701832 (ISBN)

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology

Production

Subject Categories (SSIF 2011)

Telecommunications

Infrastructure

Nanofabrication Laboratory

ISBN

9788890701832

More information

Created

10/7/2017