Controlling the Density of CNTs by Different UnderlayerMaterials in PECVD Growth
Paper in proceeding, 2013
Author
Liang Xu
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Di Jiang
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Yifeng Fu
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Shantung Tu
Johan Liu
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Proceedings of the 19th INTERNATIONAL WORKSHOP on Thermal Investigations of ICs and Systems, September 25-27 2013, Berlin, Germany, IEEE / Therminic 2013
248-252
Areas of Advance
Nanoscience and Nanotechnology
Subject Categories (SSIF 2011)
Nano Technology