Study of spatial homogeneity and nitridation of an Al nanopattern template with spectroscopic photoemission and low energy electron microscopy
Journal article, 2013
We report a study on the spatial homogeneity and nitridation of a nanopattern template using a spectroscopic photoemission and low energy electron microscopy. The template was composed of Al nanodots which were patterned into a SiO2/Si(1 1 1) surface using e-beam lithography and reactive ion etching. The template exhibited a global inhomogeneity in terms of the local topography, Al composition and structure of the individual nanopatterns. After nitridation, the individual nanopatterns were diminished, more corrugated and faceted. The nitridated nanopatterns were structurally ordered but differently orientated. The nitridation effectively removed the fluorine contaminants by decomposition of the fluorocarbon sidewalls, resulting in the AlN nanopatterns and partially nitridated Si substrate surface outside the nanopattern domains.
surface
mirror operation mode
molecular-beam epitaxy
ammonia
selective growth
speleem
inn jd
Nanopattern
journal of vacuum science & technology
contrast
substrate
Spectroscopic photoemission and low-energy electron microscopy
AlN
p1418
v19
Nitridation
chemistry
thin-films
1981
Author
B. Qi
University Science Institute Reykjavik
S. Olafsson
University Science Institute Reykjavik
A. A. Zakharov
Lunds Universitet
M. Gothelid
MAP
Björn Agnarsson
Chalmers, Applied Physics, Biological Physics
H. P. Gislason
University Science Institute Reykjavik
Applied Surface Science
0169-4332 (ISSN)
Vol. 264 349-357Subject Categories (SSIF 2011)
Physical Sciences
DOI
10.1016/j.apsusc.2012.10.025