Direct Chemical Vapor Deposition of Large-Area Carbon Thin Films on Gallium Nitride for Transparent Electrodes: A First Attempt
Journal article, 2012
Direct formation of large-area carbon thin films on gallium nitride by chemical vapor deposition without metallic catalysts is demonstrated. A high flow of ammonia is used to stabilize the surface of the GaN (0001)/sapphire substrate during the deposition at 950 degrees C. Various characterization methods verify that the synthesized thin films are largely sp(2) bonded, macroscopically uniform, and electrically conducting. The carbon thin films possess optical transparencies comparable to that of exfoliated graphene. This paper offers a viable route toward the use of carbon-based materials for future transparent electrodes in III-nitride optoelectronics, such as GaN-based light emitting diodes and laser diodes.
GaN
ammonia
graphene
transparent electrodes
III-V semiconductors
Chemical vapor deposition
chemical vapour deposition
Author
Jie Sun
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
M. T. Cole
University of Cambridge
S. Awais Ahmad
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Olof Bäcke
Chalmers, Applied Physics, Eva Olsson Group
Tommy Ive
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Markus Löffler
Chalmers, Applied Physics, Microscopy and Microanalysis
Chalmers, Applied Physics, Eva Olsson Group
Niclas Lindvall
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Eva Olsson
Chalmers, Applied Physics, Eva Olsson Group
K. B. K. Teo
AIXTRON Nanoinstruments Ltd.
Johan Liu
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Anders Larsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Avgust Yurgens
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Åsa Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
IEEE Transactions on Semiconductor Manufacturing
0894-6507 (ISSN)
Vol. 25 3 494-501Areas of Advance
Nanoscience and Nanotechnology
Infrastructure
Nanofabrication Laboratory
Subject Categories (SSIF 2011)
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/tsm.2012.2198676