Graphene Conductance Uniformity Mapping
Journal article, 2012
We demonstrate a combination of micro four-point probe (M4PP) and non-contact terahertz time-domain spectroscopy (THz-TDS) measurements for centimeter scale quantitative mapping of the sheet conductance of large area chemical vapor deposited graphene films. Dual configuration M4PP measurements, demonstrated on graphene for the first time, provide valuable statistical insight into the influence of microscale defects on the conductance, while THz-TDS has potential as a fast, non-contact metrology method for mapping of the spatially averaged nanoscopic conductance on wafer-scale graphene with scan times of less than a minute for a 4-in. wafer. The combination of M4PP and THz-TDS conductance measurements, supported by micro Raman spectroscopy and optical imaging, reveals that the film is electrically continuous on the nanoscopic scale with microscopic defects likely originating from the transfer process, dominating the microscale conductance of the investigated graphene film.
terahertz
4-point probe
Graphene
metrology
terahertz
films
optoelectronics
epitaxial graphene
layer graphene
imaging electrical characterization
micro four-point probe
electrodes
conductivity
large-area graphene
infrared-spectroscopy
Author
J. D. Buron
Danmarks Tekniske Universitet
D. H. Petersen
Danmarks Tekniske Universitet
P. Boggild
Danmarks Tekniske Universitet
D. G. Cooke
McGill University
M. Hilke
McGill University
Jie Sun
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
E. Whiteway
McGill University
P. F. Nielsen
Capres AS
O. Hansen
Danmarks Tekniske Universitet
Avgust Yurgens
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
P. U. Jepsen
Danmarks Tekniske Universitet
Nano Letters
1530-6984 (ISSN) 1530-6992 (eISSN)
Vol. 12 10 5074-5081Subject Categories (SSIF 2011)
Physical Sciences
DOI
10.1021/nl301551a