Comparing silicon deposition techniques for visible-blind detector fabrication
Paper in proceeding, 2012
Author
A. Emadi
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
J. H. Correia
R. F. Wolffenbuttel
MME 2012, Micromechanics and Microsystems Europe Workshop September 9 - 12, 2012, Ilmenau, Germany
Areas of Advance
Nanoscience and Nanotechnology
Transport
Production
Subject Categories (SSIF 2011)
Electrical Engineering, Electronic Engineering, Information Engineering
Nano Technology