Spinodal decomposition of Ti0.33Al0.67N thin films studied by atom probe tomography
Journal article, 2012
Details of the phase decomposition in NaCl-structure Ti0.33Al0.67N thin films deposited by cathodic arc evaporation are studied by atom probe tomography. We demonstrate that as-deposited films are in the earliest stage of decomposition for which electron microscopy and x-ray diffraction indicate a single-phase solid solution. Annealing at 900 degrees C further activates spinodal decomposition of the films, although pockets of unde-composed material remain after 2 h. N preferentially segregates to the AlN and TiN domains, causing the TiAlN matrix to be understoichiometric, by the energetics of N vacancies in TiAlN. The corresponding modulation in stoichiometry implies a Kirkendall effect, caused by different Al and Ti diffusivities.
Titanium aluminum nitride
Atom probe tomography
computer-models
target
fe-cr alloys
specimen preparation
nitride films
performance
ti1-xalxn
microstructure
level
deposition
Spinodal decomposition
Author
L. J. S. Johnson
Linkopings universitet
Mattias Thuvander
Chalmers, Applied Physics, Materials Microstructure
Chalmers, Applied Physics, Microscopy and Microanalysis
Krystyna Marta Stiller
Chalmers, Applied Physics, Microscopy and Microanalysis
Chalmers, Applied Physics, Materials Microstructure
M. Oden
Linkopings universitet
L. Hultman
Linkopings universitet
Thin Solid Films
0040-6090 (ISSN)
Vol. 520 13 4362-4368Subject Categories (SSIF 2011)
Physical Sciences
Areas of Advance
Materials Science
DOI
10.1016/j.tsf.2012.02.085