Low-temperature wafer-level transfer bonding
Journal article, 2001
Author
Niklaus Frank
Peter Enoksson
Department of Microelectronics
Patrick Griss
Edvard Kälvesten
Göran Stemme
Journal of Microelectromechanical Systems IEEE
Vol. 10 4 525 -531
Subject Categories (SSIF 2011)
Mechanical Engineering
Materials Engineering
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Nanoscience and Nanotechnology
Transport
Production
Materials Science