Low temperature cofired ceramics for mems bonding
Paper in proceeding, 2010
Author
M. F. Khan
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Farzan Alavian Ghavanini
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Cristina Rusu
Sjoerd Haasl
L Löfgren
K Persson
K. Schjolberg-Henriksen
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Micronano Systems Workshop 2010 (MSW 2010), 4-5 May, 2010, Stockholm, Sweden
Areas of Advance
Transport
Production
Subject Categories (SSIF 2011)
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering