Tunable thin film bulk acoustic wave resonators with improved Q-factor
Journal article, 2010
The tunable solidly mounted Ba0.25Sr0.75TiO3 (BSTO) thin film bulk acoustic wave resonators (TFBARs) with improved Q-factor are fabricated and characterized. The BSTO films are grown by magnetron sputtering at temperature 600 degrees C and extremely low sputter gas pressure 2 mTorr using on-axis configuration. The measured TFBARs Q-factor is more than 250 and mechanical Q-factor is more than 350 at 5 GHz resonance frequency. The improvement in the Q-factor is associated with reduction in the BSTO film grain misorientation. The latter is responsible for generation of shear waves leaking through the Bragg reflector and corresponding acoustic loss. (C) 2010 American Institute of Physics.
baxsr1-xtio3
Author
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Applied Physics Letters
0003-6951 (ISSN) 1077-3118 (eISSN)
Vol. 96 21 Article Number: 212904 - 212904Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology
Materials Science
Driving Forces
Sustainable development
Roots
Basic sciences
Subject Categories (SSIF 2011)
Electrical Engineering, Electronic Engineering, Information Engineering
Condensed Matter Physics
DOI
10.1063/1.3441413