SrTiO3 thin film varactors on Si for microwave applications
Journal article, 2002
Author
Andrei Vorobiev
Department of Microelectronics and Nanoscience
Pär Rundqvist
Department of Microelectronics and Nanoscience
Khaled Khamchane
Department of Microelectronics and Nanoscience
Spartak Gevorgian
Department of Microelectronics and Nanoscience
Subject Categories (SSIF 2011)
Other Materials Engineering