pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique
Journal article, 2010
pH sensitive properties of barium strontium titianate (BST) high k thin films as alternative gate material for field-effect capacitive (bio-) chemical sensors based on an electrolyte-insulator semiconductor system have been investigated. The BST films of different composition (Ba0.3Sr0.69TiO3, Ba0.25Sr0.75TiO3 and MG doped Ba0.8Sr0.2Mg0.1Ti0.9O3 were deposited by pulsed laser deposition technique from targets farbicated by self-propagating high-temperatures synthesis. The realised sensors have been electrochemically characterised by means of impedance-spectroscopy, capacitance-voltage and constant-capacitance method. The sensors possess a Nernstian-like pH sensitivity in the concentration range between pH 3 and 11 with a response time of 5-10 s. An equivalent circuit model for the BST-based capacitive field-effect sensor is discussed.(C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
PLD
FABRICATION
TUNABLE
FIELD-EFFECT TRANSISTORS
MEMBRANE
APPLICATIONS
field effect sensor
SENSING PROPERTIES
ISFET
CHEMICAL SENSORS
OXIDES
barium strontium titanate
biosensor
IDENTICAL TRANSDUCER PRINCIPLE
DEVICES
Author
V. V. Buniatyan
Fachhochschule Aachen
State Engineering University of Armenia
M. H. Abouzar
Fachhochschule Aachen
Forschungszentrum Jülich (FZJ)
N. W. Martirosyan
State Engineering University of Armenia
J. Schubert
Forschungszentrum Jülich (FZJ)
Spartak Gevorgian
Chalmers, Applied Physics, Physical Electronics
M. J. Schoning
Forschungszentrum Jülich (FZJ)
Fachhochschule Aachen
A. Poghossian
Fachhochschule Aachen
Forschungszentrum Jülich (FZJ)
Physica Status Solidi (A) Applications and Materials
1862-6300 (ISSN) 1862-6319 (eISSN)
Vol. 207 4 824-830Subject Categories (SSIF 2011)
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1002/pssa.200983310