Assessment of Various Epitaxial Lift-off Methods for Heterostructure Barrier Varactor
Paper in proceeding, 2010
HBV
wafer bonding
epitaxial lift-off techniques
Author
Mohammad Hadi Tavakoli Dastjerdi
Chalmers, Applied Physics, Physical Electronics
Anke Sanz-Velasco
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Josip Vukusic
Chalmers, Applied Physics, Physical Electronics
Jan Stake
Chalmers, Applied Physics, Physical Electronics
GigaHertz Symposium 2010
72-
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology
Infrastructure
Nanofabrication Laboratory
Subject Categories (SSIF 2011)
Other Electrical Engineering, Electronic Engineering, Information Engineering